Study of large-field beryllium window for SR lithography (Poster Paper)

Kouichi Hara; Tohru Itoh

doi:10.1117/12.136029

9 July 1992 Study of large-field beryllium window for SR lithography (Poster Paper)

Kouichi Hara, Tohru Itoh

Proceedings Volume 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II; (1992) https://doi.org/10.1117/12.136029
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

The resisting pressure of deep cylindrical beryllium (Be) windows was studied theoretically and experimentally. A cylindrical Be window (window size, 50 X 50 mm2; thickness, 20 micrometers ; radius, 30 mm) which was fabricated on the basis of the theoretical calculation sustained up to 0.43 MPa (pressure difference) in hydraulic pressure burst testing. Deflection of this foil was 0.2 mm at this pressure. A planar window (diameter, 38 mm; thickness, 30 micrometers ) sustained pressures in the region of 0.25 MPa to 0.49 MPa. Deflections of these foils were in the region of 0.9 mm to 1.4 mm. A deep cylindrical Be window was found to be superior to a planar one in 1 atm. (0.1 MPa) helium gas, in terms of its larger field size and higher transmittance of SR.

Citation Download Citation

Kouichi Hara and Tohru Itoh "Study of large-field beryllium window for SR lithography (Poster Paper)", Proc. SPIE 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, (9 July 1992); https://doi.org/10.1117/12.136029

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