Fabrication of optical surfaces with low subsurface damage using a float polishing process

David W. Reicher; C. F. Kranenberg; R. S. Stowell; Kenneth C. Jungling; John Robert McNeil

doi:10.1117/12.60103

29 July 1992 Fabrication of optical surfaces with low subsurface damage using a float polishing process

David W. Reicher, C. F. Kranenberg, R. S. Stowell, Kenneth C. Jungling, John Robert McNeil

Proceedings Volume 1624, Laser-Induced Damage in Optical Materials: 1991; (1992) https://doi.org/10.1117/12.60103
Event: Laser-Induced Damage in Optical Materials: 1991, 1991, Boulder, CO, United States

Abstract

The attempt to eliminate subsurface damage in polished materials is a major objective in optical and semiconductor fabrication. The level of subsurface damage in optical components is proportional to the surface scatter and related to the laser damage threshold of the optic. The float polishing process has been shown to produce surfaces with low subsurface damage on ferrite materials. We have ground samples of rough cut Corning 7940 fused silica using synthetic polycrystalline diamond. These samples were then float polished on a precision machine manufactured by Toyoda Machine Works Limited. Our surfaces were characterized using differential phase interference microscopy, total internal reflection microscopy, and scatterometry. We will describe the fabrication process and report the results of the surface and subsurface characterization.

Citation Download Citation

David W. Reicher, C. F. Kranenberg, R. S. Stowell, Kenneth C. Jungling, and John Robert McNeil "Fabrication of optical surfaces with low subsurface damage using a float polishing process", Proc. SPIE 1624, Laser-Induced Damage in Optical Materials: 1991, (29 July 1992); https://doi.org/10.1117/12.60103

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available