Design for vibration control in microelectronics facilities

Roger Anderson

doi:10.1117/12.56835

1 February 1992 Design for vibration control in microelectronics facilities

Roger Anderson

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56835
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

This presentation reviews the evolution of the microelectronics industry in terms of sophistication of facility requirements as related to process equipment and the ever decreasing size of circuit features into the present sub-micron level.

Citation Download Citation

Roger Anderson "Design for vibration control in microelectronics facilities", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56835

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