Differential magnetooptical Fabry-Perot-interference-structures for the characterization of buried-layer-systems

R. Nies

doi:10.1117/12.2297863

1 October 1991 Differential magnetooptical Fabry-Perot-interference-structures for the characterization of buried-layer-systems

R. Nies

Author Affiliations +

Proceedings Volume 1576, 16th International Conference on Infrared and Millimeter Waves; 157646 (1991) https://doi.org/10.1117/12.2297863
Event: 16th International Conference on Infrared and Millimeter Waves, 1991, Lausanne, Switzerland

Abstract

Differential magnetooptical Fabry - Perot - Interference structures are an excellent tool for the determination of buried refractive index profiles which exist within microstructures used by modern semiconductor technology. The coherent superposition of the phases and amplitudes of circularly polarized IR - waves respond sensitively but differently to the variation of physical - and profile - parameters. The method is working non - destructive and contactless and its accuracy is comparable with other destructive methods used to determine profile functions such as SIMS, RBS, spreading resistance ect.. Especially the accurate analysis of doping profiles which are more than 10 μm below the surface is possible.

Citation Download Citation

R. Nies "Differential magnetooptical Fabry-Perot-interference-structures for the characterization of buried-layer-systems", Proc. SPIE 1576, 16th International Conference on Infrared and Millimeter Waves, 157646 (1 October 1991); https://doi.org/10.1117/12.2297863

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