Metrics for metrology on an atomic scale (Abstract Only)

E. Clayton Teague

doi:10.1117/12.134887

1 February 1992 Metrics for metrology on an atomic scale (Abstract Only)

E. Clayton Teague

Proceedings Volume 1556, Scanning Microscopy Instrumentation; (1992) https://doi.org/10.1117/12.134887
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The focus of this paper is on the principal means of realizing a metric appropriate for atomic scale metrology. These are evaluated to determine the systematic uncertainties involved in relating sensed displacements to the international standard of length.

Citation Download Citation

E. Clayton Teague "Metrics for metrology on an atomic scale (Abstract Only)", Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); https://doi.org/10.1117/12.134887

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