Study of TEM micrographs of thin-film cross-section replica using spectral analysis

Ting Mei; Xu Liu; Jinfa Tang; Peifu Gu

doi:10.1117/12.49494

1 December 1991 Study of TEM micrographs of thin-film cross-section replica using spectral analysis

Ting Mei, Xu Liu, Jinfa Tang, Peifu Gu

Proceedings Volume 1554, Second International Conference on Photomechanics and Speckle Metrology; (1991) https://doi.org/10.1117/12.49494
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The method of spectral analysis for studying the TEM micrograph of thin film replicas is presented. It has been proved that there are spectral losses in the TEM micrograph, which are concerned with the thickness of the replica. A TEM micrograph of the thin film cross section replica is studied with the aid of a computer.

Citation Download Citation

Ting Mei, Xu Liu, Jinfa Tang, and Peifu Gu "Study of TEM micrographs of thin-film cross-section replica using spectral analysis", Proc. SPIE 1554, Second International Conference on Photomechanics and Speckle Metrology, (1 December 1991); https://doi.org/10.1117/12.49494

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