Pressure effects in the microwave plasma growth of polycrystalline diamond

Alan B. Harker; Jeffrey F. DeNatale

doi:10.1117/12.48274

1 December 1991 Pressure effects in the microwave plasma growth of polycrystalline diamond

Alan B. Harker, Jeffrey F. DeNatale

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48274
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Microwave plasma deposition of polycrystalline diamond is investigated over the pressure range 1 to 100 kPa. The conditions of growth, microstructure, and spectroscopic properties of the resulting materials are compared. A phenomenological description of the dependence of diamond microstructure upon growth conditions is developed.

Citation Download Citation

Alan B. Harker and Jeffrey F. DeNatale "Pressure effects in the microwave plasma growth of polycrystalline diamond", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48274

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