Morphological phenomena of CVD diamond (Part II)

Wei Zhu; Russell F. Messier; Andrzej R. Badzian

doi:10.1117/12.48297

1 December 1991 Morphological phenomena of CVD diamond (Part II)

Wei Zhu, Russell F. Messier, Andrzej R. Badzian

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48297
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The morphological evolution on the (1 1 1 } and (100 } faces of CVD diamond proceeded overwhelmingly through a two-dimensional layer mechanism. However, experimental evidence on defect-facilitated renucleation on the {1 1 1} faces and direct atom attachment to the lattice on the {100} faces was also found which resulted in one-dimensional growth. The {100)-oriented films were developed through a typical competitive, evolutionary selection process with sufficient surface diffusion which leaded to the formation of the pronounced <100> textured columnar structure, whereas the {1 1 1}-faceted crystals were produced under conditions of very high adatom mobility with periodical renucleation, the preferential growth direction of which was along the <110>. On the other hand, films produced at high carbon supersaturations possessed a randomly oriented columnar structure with ball shaped clustered surface, the growth process of which was dominated by constant renucleation. While the {1 1 1}-faceted crystals were usually highly defective in their internal structure, the {100}-oriented crystals were generally planar-defect free.

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Wei Zhu, Russell F. Messier, and Andrzej R. Badzian "Morphological phenomena of CVD diamond (Part II)", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48297

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