Paper
1 January 1992 Convenient noncontact radius measurement using secondary moire properties
Hans-Joerg Heimbeck
Author Affiliations +
Abstract
The local radius of a reflecting surface can be measured by imaging a grating in a F-Theta- Setup. The radius is determined by measuring the grating period. That can be done in a moire technique where the reference grating is a moire itself. The reticule can be scaled for direct reading of the radius by using the properties of the secondary moire.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hans-Joerg Heimbeck "Convenient noncontact radius measurement using secondary moire properties", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134846
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KEYWORDS
Moire patterns

Photomasks

Contact lenses

Optical testing

Optics manufacturing

Reticles

Manufacturing

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