Comparison of optical and mechanical measurements of surface finish

Eugene L. Church; Christopher Dainty; David M. Gale; Peter Z. Takacs

doi:10.1117/12.134865

1 January 1992 Comparison of optical and mechanical measurements of surface finish

Eugene L. Church, Christopher Dainty, David M. Gale, Peter Z. Takacs

Proceedings Volume 1531, Advanced Optical Manufacturing and Testing II; (1992) https://doi.org/10.1117/12.134865
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The topography of a smooth machined silicon flat has been measured with a phase-shifting Linnik microscope and a Talystep mechanical profilometer and the results compared in the frequency domain. Excellent agreement is found for the strong low-frequency components that determine the gross properties of the surface. Differences observed for some small high- frequency components may have implications for the understanding of microscope imaging properties.

Citation Download Citation

Eugene L. Church, Christopher Dainty, David M. Gale, and Peter Z. Takacs "Comparison of optical and mechanical measurements of surface finish", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134865

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