Determination of optical constants of thin film in the soft x-ray region

Yong Hong Guo; Zhengxiu Fan; Ouyang Bin; Lei Jin; Jian-Da Shao

doi:10.1117/12.47246

1 November 1991 Determination of optical constants of thin film in the soft x-ray region

Yong Hong Guo, Zhengxiu Fan, Ouyang Bin, Lei Jin, Jian-Da Shao

Author Affiliations +

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47246
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

We presented a method of determining optical constants of a thin film using the reflectance R(theta) curve. Other parameters of the film, such as film thickness and roughness, are also determined with the derivation of the optical constants(n,k). To illustrate the method, the results of the film Al are given.

Citation Download Citation

Yong Hong Guo, Zhengxiu Fan, Ouyang Bin, Lei Jin, and Jian-Da Shao "Determination of optical constants of thin film in the soft x-ray region", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47246

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE