Surface nitride synthesis by multipulse excimer laser irradiation

Emilia D'Anna; Gilberto Leggieri; Armando Luches; Maurizio Martino; Antonio Luigi Perrone; Guiseppe Majni; Paolo Mengucci; A. V. Drigo; Ion N. Mihailescu

doi:10.1117/12.46938

1 September 1991 Surface nitride synthesis by multipulse excimer laser irradiation

Emilia D'Anna, Gilberto Leggieri, Armando Luches, Maurizio Martino, Antonio Luigi Perrone, Guiseppe Majni, Paolo Mengucci, A. V. Drigo, Ion N. Mihailescu

Author Affiliations +

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46938
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

The formation of nitride surface layers on titanium plates (0.14 mm and 3 mm thick) by multipulse (100 to 500) XeCl excimer laser ((lambda) equals 308 nm) irradiation in N2 and NH3 atmospheres (1100 mbar) at a laser fluence of approximately 1 J/cm2 and repetition rate of 50 Hz, with careful experimental precautions against oxygen contamination, is studied. After irradiation, the samples were examined by scanning and transmission electron microscopy, analyzed by Rutherford backscattering and nuclear reaction techniques and by x- ray diffraction spectroscopy. All the experimental results point to the formation of pure titanium nitride layers without any detectable oxide phase

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Emilia D'Anna, Gilberto Leggieri, Armando Luches, Maurizio Martino, Antonio Luigi Perrone, Guiseppe Majni, Paolo Mengucci, A. V. Drigo, and Ion N. Mihailescu "Surface nitride synthesis by multipulse excimer laser irradiation", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46938

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