Excimer laser performance under various microwave excitation conditions

Hans Hermann Klingenberg; Frank Gekat

doi:10.1117/12.46925

1 September 1991 Excimer laser performance under various microwave excitation conditions

Hans Hermann Klingenberg, Frank Gekat

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46925
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

Microwave pumped rare-gas halide mixtures feature excimer laser emission without preionization. The performance of a XeCl excimer laser is investigated with an optimized waveguide coupling geometry. Parameters such as the microwave power, duration of the microwave pulse, and the rise time of the microwave pulse from 25 ns to 220 ns were varied. The pulsed microwave L-band transmitter had a power of up to 10 MW, an adjustable pulse duration (500 ns to 6000 ns), and a pulse repetition frequency up to 400 Hz. The coupling geometry consisted of a double ridge waveguide. The discharge tube was a quartz capillary placed between the ridges. Two tubes were used. One had an outer and inner diameter of 10.3 mm and 2.6 mm, the other 8 mm and 5.8 mm, respectively. The total active length was 438 mm. A study of a microwave power of 2.5 MW deposited into the discharge yielded at low repetition frequencies a non-homogeneous deposition. With a new resonant coupling geometry, a XeCl laser energy of up to 1.8 mJ in a 16 ns long pulse was achieved.

Citation Download Citation

Hans Hermann Klingenberg and Frank Gekat "Excimer laser performance under various microwave excitation conditions", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46925

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available