Acid-catalyzed pinacol rearrangement: chemically amplified reverse polarity change

Ratnam Sooriyakumaran; Hiroshi Ito; Eugene A. Mash

doi:10.1117/12.46390

1 June 1991 Acid-catalyzed pinacol rearrangement: chemically amplified reverse polarity change

Ratnam Sooriyakumaran, Hiroshi Ito, Eugene A. Mash

Author Affiliations +

Proceedings Volume 1466, Advances in Resist Technology and Processing VIII; (1991) https://doi.org/10.1117/12.46390
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

The reverse polarity change from a polar to a nonpolar state has been successfully incorporated in the design of chemical amplification resists. The imaging mechanism is based on the pinacol-pinacolone rearrangement, wherein vic-diols (pinacols) are converted to ketones or aldehydes with photochemically generated acid as a catalyst. In addition to a polymeric pinacol which undergoes the rearrangement very cleanly in the solid state, aqueous base developable three-component negative deep UV resist systems are described, which are based on phenolic resins, small pinacols, and triphenylsulfonium hexafluoroantimonate as the acid generator.

Citation Download Citation

Ratnam Sooriyakumaran, Hiroshi Ito, and Eugene A. Mash "Acid-catalyzed pinacol rearrangement: chemically amplified reverse polarity change", Proc. SPIE 1466, Advances in Resist Technology and Processing VIII, (1 June 1991); https://doi.org/10.1117/12.46390

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