In-process evaluation of water jet dynamics in water jet guided laser processing through observation of Raman scattering

S. Ui; M. Osawa; S. Kadoya; M. Michihata; S. Takahashi

doi:10.1117/12.3027292

31 December 2024 In-process evaluation of water jet dynamics in water jet guided laser processing through observation of Raman scattering

S. Ui, M. Osawa, S. Kadoya, M. Michihata, S. Takahashi

Author Affiliations +

Proceedings Volume 13487, Optics and Photonics International Congress 2024; 134870N (2024) https://doi.org/10.1117/12.3027292
Event: Optics and Photonics International Congress, 2024, Yokohama, Japan

Abstract

Water Jet Guided Laser (WJGL) processing uses high-pressure water jet as a waveguide for processing pulse laser. The processing laser is focused and coupled inside the water jet and delivered to the workpiece by total internal reflection (TIR). Therefore, monitoring how the laser propagates inside the water jet is important in maintaining quality processing. In this study, a novel evaluation method for the laser propagation characteristic in the water jet waveguide is suggested utilizing the distribution of Raman scattering which comes out from the water jet in response to the processing laser. In the experiment, the feasibility of this method was demonstrated by comparing it to a conventional evaluation method of water jet breakup and it was applied to the evaluation of laser propagation characteristic during the WJGL drilling process on SiC workpiece. From high-speed imaging of Raman scattering in the water jet, it was found that Raman scattering breaks in the middle of the water jet for most of the pulses once the drilling made certain progress. This breakdown in Raman scattering distribution could suggest that the processing laser did not reach the workpiece for those pulses and therefore that the workpiece was processed only intermittently. The potential for achieving more efficient processing, if such disturbance in the water jet could be controlled, was also suggested.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

S. Ui, M. Osawa, S. Kadoya, M. Michihata, and S. Takahashi "In-process evaluation of water jet dynamics in water jet guided laser processing through observation of Raman scattering", Proc. SPIE 13487, Optics and Photonics International Congress 2024, 134870N (31 December 2024); https://doi.org/10.1117/12.3027292

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KEYWORDS

Raman scattering

Laser processing

Laser scattering

Laser beam propagation

Pulsed laser operation

Waveguides

Laser drilling

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