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We report on the fabrication of linear and circular reflective Bragg-Fresnel zone
plates made by a multistep process using microfabrication technologies. The zone plate
patterns were generated by electron beam lithography on a Mo/C triode sputtered
multilayer interference mirror. The minimum zone size was 0.3 p.m wide. The pattern
was transferred anisotropically into the multilayer by reactive ion etching in a fluorinated
plasma. An intermediate metallic mask made by lift-off was used for the transfer
process. The groove depth was monitored by following the reflectivity of the structure
with a helium-neon laser during the etching process. The groove profile and dimensional
control were considered.
Chantal G. Khan Malek,T. Moreno,Philippe Guerin,F. R. Ladan,Jean-Rene Rivoira, andRobert J. Barchewitz
"Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23231
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Chantal G. Khan Malek, T. Moreno, Philippe Guerin, F. R. Ladan, Jean-Rene Rivoira, Robert J. Barchewitz, "Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range," Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23231