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Laser-sustained plasma light source plays an important role in industrial production, especially in semiconductor inspection because of its high brightness, long lifetime and high stability. The plasma temperature is an important index to characterize the brightness and spectral composition of the light source. The higher the plasma temperature is, the higher the brightness of the light source is, and the more ultraviolet spectrum components are in the light source. Therefore, the analysis of the plasma temperature can guide the optimization design of the laser-sustained light source. In this paper, simulation model is bult using Comsol Multiphysics software and completed by using heat transfer module, mathematics module and fluid module. The influence of interior flow field of the high-pressure bulb on plasma temperature is considered. The analysis results show that under the existing high pressure bulb structure, irregular flow field will be formed due to thermal effect, resulting lower plasma temperature and affecting the stable output of the light source. By adding the gas flow device and controlling the gas flow rate, the irregular flow field can be reduced, and higher plasma temperature is obtained, which means the brightness of the light source can be improved.
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