Optical surface microtopography using phase-shifting Nomarski microscope

Wataru Shimada; Tadamitu Sato; Toyohiko Yatagai

doi:10.1117/12.51058

1 January 1991 Optical surface microtopography using phase-shifting Nomarski microscope

Wataru Shimada, Tadamitu Sato, Toyohiko Yatagai

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51058
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The use of the phase shifting interferometric technique is discussed to make quantitative surface profiling using the Nomarski differential interference microscope. Lateral shift of the Nomarski prism introduces mutual phase shift between interfering two wavefronts with small amount of shear. Since the analyzed phase distribution corresponds to the differential of the surface profile under test, integration of the phase distribution gives the correct surface topography. The procedure for an analysis method and experimental results are presented.

Citation Download Citation

Wataru Shimada, Tadamitu Sato, and Toyohiko Yatagai "Optical surface microtopography using phase-shifting Nomarski microscope", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51058

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