Automatic inspection technique for optical surface flaws

GuoGuang Yang; Wenliang Gao; Shangyi Cheng

doi:10.1117/12.51051

1 January 1991 Automatic inspection technique for optical surface flaws

GuoGuang Yang, Wenliang Gao, Shangyi Cheng

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51051
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Industrial inspection of optical component surface flaws requires objective, high efficient and fast measurement methods and instruments. In this paper, a novel method, which is practical for on- line inspecting optical component surface flaws in manufacturing industry, is discribed. Laser beam goes through a lean- placed mirror with a slot in center onto the surface of the specimen. The imformation of surface flaws is obtained through analysing the frequency spectrum of reflective light which is detected by a photomultiplier, the specimen scanning control and signal processing are finished by a low - cost and handy single- board microcomputer. The theory that applies the scanning frequency spectrum method , the method for determining flaw size and measuring sensitivity as well as control model for various specimen are analysed in detail .A system has been built according to the idea discribed above. By using the system, several specimen are measured, the comparison and analysis between exprimental results and actual flaw conditions are given. The minimum detectable flaw is 3 micrometer, the measuring error is also given.

Citation Download Citation

GuoGuang Yang, Wenliang Gao, and Shangyi Cheng "Automatic inspection technique for optical surface flaws", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51051

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