Optical field simulation of nanoscale structures on wafer surfaces based on microscopic imaging

Na Wang; Xiaojiao Song; Weihu Zhou; Guannan Li; Lituo Liu

doi:10.1117/12.3046321

26 September 2024 Optical field simulation of nanoscale structures on wafer surfaces based on microscopic imaging

Na Wang, Xiaojiao Song, Weihu Zhou, Guannan Li, Lituo Liu

Proceedings Volume 13282, Second Advanced Imaging and Information Processing Conference (AIIP 2024); 132820L (2024) https://doi.org/10.1117/12.3046321
Event: Second Advanced Imaging and Information Processing Conference (AIIP 2024), 2024, Xining, China

Abstract

Periodic arrays of nanoscale structures on wafer surfaces can be fabricated using micro- and nano-fabrication processes. By changing the morphology and arrangement of array structures, precise control of light can be achieved, enabling the functionality of various optical devices. The paper simulates the nanoscale array structures on the wafer surface using Finite-Difference Time-Domain (FDTD) method and conducts microscopic imaging. After wavelength optimization, it was found that for the single-layer SiO₂ array structure on the wafer surface, with shorter illumination wavelengths and larger objective numerical apertures, the characteristic information of the SiO₂ structure becomes more prominent in the microscopic imaging. However, for the multi-layer SiO₂-Si₃N₄-SiO₂ array structure on the wafer surface, the illumination source no longer follows the principle that shorter wavelengths and larger numerical apertures result in better imaging quality. Instead, the optimal imaging quality is achieved with illumination wavelengths in the range of 230nm-260nm and a numerical aperture of 0.55 for the objective lens. Therefore, in practical testing, appropriate illumination wavelengths and numerical apertures for the objective lens should be selected to achieve the best imaging quality.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Na Wang, Xiaojiao Song, Weihu Zhou, Guannan Li, and Lituo Liu "Optical field simulation of nanoscale structures on wafer surfaces based on microscopic imaging", Proc. SPIE 13282, Second Advanced Imaging and Information Processing Conference (AIIP 2024), 132820L (26 September 2024); https://doi.org/10.1117/12.3046321

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