Paper
1 November 1990 Pregrooving on glass disks by the sol-gel method (Part I): formation and evaluation of pregrooved glass disks
Atsunori Matsuda, Yoshihiro Matsuno, Shigeyuki Kataoka, Shinya Katayama, Toshio Tsuno, Noboru Tohge, Tsutomu Minami
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Abstract
Pregrooved glass disks were prepared by the application of the sol-gel coating technique; the soda-lime-silica glass disks were coated with polyethylene glycol(PEG)-containing Si02-Ti02 gel films, in which fine patterns were formed by pressing a stamper. The refractive index of the pregrooved layer was matched with that of the glass disks by adjusting the TiO2 content. When the weight ratio of PEG with the average molecular weight of 600 to SiO2-TiO oxides was unity, the pitch of the pregrooves formed was unchanged in comparison with that of the stamper used after the heat-treatment at 350°C, while the land height and the land width of the pregrooves were respectively reduced to 6O9 and 85 of those of the stamper after the heat-treatment. The noise level of the glass disks with the pregrooved SiO2-Ti02 layer was lower by 1-2 dB than that of the disks with pure 5i02 layer in the frequency range from 0.5 to 2.0 MHz. The lower noise level of the former can be ascribed to the agreement in the refractive index between the pregrooved layer and the glass disks.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Atsunori Matsuda, Yoshihiro Matsuno, Shigeyuki Kataoka, Shinya Katayama, Toshio Tsuno, Noboru Tohge, and Tsutomu Minami "Pregrooving on glass disks by the sol-gel method (Part I): formation and evaluation of pregrooved glass disks", Proc. SPIE 1328, Sol-Gel Optics, (1 November 1990); https://doi.org/10.1117/12.22546
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Cited by 12 scholarly publications and 2 patents.
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KEYWORDS
Glasses

Refractive index

Coating

Sol-gels

Optical lithography

Oxides

Optical properties

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