Electron cyclotron resonance radio-frequency hybrid plasma-deposited diamond-like carbon as an optical material

Sri S. Sritharan; John S. Wilson; Pierre R. Barbier; Jacques I. Pankove

doi:10.1117/12.22464

1 December 1990 Electron cyclotron resonance radio-frequency hybrid plasma-deposited diamond-like carbon as an optical material

Sri S. Sritharan, John S. Wilson, Pierre R. Barbier, Jacques I. Pankove

Author Affiliations +

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22464
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Diamondlike carbon (DLC) is deposited by electron cyclotron resonance radio-frequency (ECR-RF) hybrid plasma method. The films are hard with optical bandgap ranges between 1. 1 and 1. 8 eV depending on the deposition parameters. Waveguide structures have been fabricated in DLC using liftoff technique. The films are also characterized by Electron energy loss spectroscopy and Raman spectroscopy. 2.

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Sri S. Sritharan, John S. Wilson, Pierre R. Barbier, and Jacques I. Pankove "Electron cyclotron resonance radio-frequency hybrid plasma-deposited diamond-like carbon as an optical material", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22464

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