Simulated grating for absolute measuring the transfer function of 300mm aperture Fizeau interferometer

Yuhang Shen; Jiaqi Qin; Sen Han; Xueyuan Li; Ying Yang; Liwei Zhang; Yanjun Wang; Chengliang Fu; Linji Ji; Quanzhao Wang; Bo Zhang; Jincheng Zhuang; Songlin Zhuang

doi:10.1117/12.3035907

20 November 2024 Simulated grating for absolute measuring the transfer function of 300mm aperture Fizeau interferometer

Yuhang Shen, Jiaqi Qin, Sen Han, Xueyuan Li, Ying Yang, Liwei Zhang, Yanjun Wang, Chengliang Fu, Linji Ji, Quanzhao Wang, Bo Zhang, Jincheng Zhuang, Songlin Zhuang

Author Affiliations +

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132410K (2024) https://doi.org/10.1117/12.3035907
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

The simulated grating for absolute measuring the transfer function of large-aperture Fizeau interferometer is proposed, combining with the surface and homogeneity absolute measurement data, the simulated grating absolute surface data without aberration can be obtained more accurately to achieve the full aperture transfer function absolute measurement at all spatial frequency. A 300mm aperture Fizeau interferometer experimental results show that the absolute surface errors of the three flats are less than λ/20(PV) and λ/100(RMS), and the homogeneity measurement is better than 1*10^-6. The optimized transfer function is better than 0.86 at 1 mm^-1 spatial frequency, which is a 10% improvement.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuhang Shen, Jiaqi Qin, Sen Han, Xueyuan Li, Ying Yang, Liwei Zhang, Yanjun Wang, Chengliang Fu, Linji Ji, Quanzhao Wang, Bo Zhang, Jincheng Zhuang, and Songlin Zhuang "Simulated grating for absolute measuring the transfer function of 300mm aperture Fizeau interferometer", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132410K (20 November 2024); https://doi.org/10.1117/12.3035907

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