Paper
22 November 2024 Design of absolute 1.5D grating scale
Huan Wang, Wei Jia, Changhe Zhou
Author Affiliations +
Abstract
The grating scale is a high-precision displacement measurement sensor based on the principle of grating optics. Among them, the 1.5D grating scale, as a special type, traditionally relies on relative measurement methods. In this paper, we introduce an innovative concept of an absolute 1.5D grating scale, whose core lies in the addition of labels at both ends of the grating scale. This design utilizing the concept of absolute measurement overcomes the limitations of relative measurement, enabling direct reading of position information without a reference point, thus significantly enhancing overall performance.The grating scale features a large detection range, high precision, and fast response, making it widely used in various fields such as machinery manufacturing, electronic equipment manufacturing, scientific research, and aerospace.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Huan Wang, Wei Jia, and Changhe Zhou "Design of absolute 1.5D grating scale", Proc. SPIE 13240, Holography, Diffractive Optics, and Applications XIV, 132401J (22 November 2024); https://doi.org/10.1117/12.3036125
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KEYWORDS
Optical gratings

Interferometers

Sensors

Precision measurement

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