Integrated low-cost and low-loss spot size converter for thin-film lithium niobate

Zhaozheng Yi; Mingjin Wang; Wenzhen Liu; Shengmin Zhou; Jiahao Si; Chenyan Tang; Dongxu Xin; Wanhua Zheng

doi:10.1117/12.3035985

27 November 2024 Integrated low-cost and low-loss spot size converter for thin-film lithium niobate

Zhaozheng Yi, Mingjin Wang, Wenzhen Liu, Shengmin Zhou, Jiahao Si, Chenyan Tang, Dongxu Xin, Wanhua Zheng

Proceedings Volume 13236, Optoelectronic Devices and Integration XIII; 132360J (2024) https://doi.org/10.1117/12.3035985
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

An integrated low-cost and low-loss spot size converter (SSC) for thin film lithium niobate (TFLN) is important to support various high-performance hetero-integrated devices, such as electro-optic modulators, optical frequency combs, and optical phased array. The high performance and power consumption restrict the development of hetero-integrated devices consisting of silicon on insulator and lithium niobate, because of a large difference in mode field sizes between TFLN waveguides and standard single mode fibers or semiconductor lasers. Up to now, most low-loss SSCs whose feature sizes range from tens to hundreds of nanometers, are fabricated by high-cost electron beam lithography. Here we theoretically propose an integrated low-cost and low-loss SSC that reduces the end-face coupling losses in integrated system and improve the coupling efficiency, meanwhile especially its feature size of 1 μm can be fabricated by standard lithography. Based on evanescent wave coupling theory, a Si₃N₄ tapered waveguide surrounded by an amorphous silicon thin layer is used to enhance evanescent wave coupling strength, thereby achieving a high coupling efficiency of 88% between the TFLN and semiconductor lasers. The low-cost and low-loss SSC provides a potential method for hetero-integrated TFLN devices.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zhaozheng Yi, Mingjin Wang, Wenzhen Liu, Shengmin Zhou, Jiahao Si, Chenyan Tang, Dongxu Xin, and Wanhua Zheng "Integrated low-cost and low-loss spot size converter for thin-film lithium niobate", Proc. SPIE 13236, Optoelectronic Devices and Integration XIII, 132360J (27 November 2024); https://doi.org/10.1117/12.3035985

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KEYWORDS

Waveguides

Lithium niobate

Silicon

Semiconductor lasers

Amorphous silicon

Thin films

Wave propagation

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