Laser-assisted etching of ferroelectric ceramics for the reticulation of IR detector arrays

Michael A. Todd; Rex Watton

doi:10.1117/12.22316

1 October 1990 Laser-assisted etching of ferroelectric ceramics for the reticulation of IR detector arrays

Michael A. Todd, Rex Watton

Proceedings Volume 1320, Infrared Technology and Applications; (1990) https://doi.org/10.1117/12.22316
Event: Eighth International Conference Infrared Technology and Applications, 1990, London, United Kingdom

Abstract

Focal plane arrays using ferroelectric ceramics have shown considerable success for ambient temperature IR imaging. To realise their full potential, however, the arrays must be reticulated, ie. the individual detector elements must be physically separated. In the research reported here, the use of focused argon-ion laser radiation to etch lead-compound ferroelectric ceramics in aqueous KOH is demonstrated. The experimental conditions required to laser-etch the desired structures for detector elements are discussed. Finally, the use of a reflective metal layer as an etch stop is assessed and laser-reticulated elements at 1 00 microns pitch are shown.

Citation Download Citation

Michael A. Todd and Rex Watton "Laser-assisted etching of ferroelectric ceramics for the reticulation of IR detector arrays", Proc. SPIE 1320, Infrared Technology and Applications, (1 October 1990); https://doi.org/10.1117/12.22316

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