Design of a full-filed transmission x-ray microscope with 30nm resolution

Keliang Liao; Qili He; Panyun Li; Maohua Song; Haifeng Zhao; Peiping Zhu

doi:10.1117/12.3019773

30 April 2024 Design of a full-filed transmission x-ray microscope with 30nm resolution

Keliang Liao, Qili He, Panyun Li, Maohua Song, Haifeng Zhao, Peiping Zhu

Proceedings Volume 13155, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems; 1315518 (2024) https://doi.org/10.1117/12.3019773
Event: Sixth Conference on Frontiers in Optical Imaging Technology and Applications (FOI2023), 2023, Nanjing, JS, China

Abstract

A full-field transmission hard X-ray microscope (TXM) with 30nm resolution was designed and its prototype was constructed. The TXM relies on a compact, high stiffness, low heat dissipation and low vibration design philosophy and utilizes Fresnel Zone plate (FZP) as imaging optics. The design of the TXM was introduced in detail, including the optical layout, the parameters of the FZP, the mechanical design of the TXM instrument. Preliminary imaging result with 52nm spatial resolution was achieved.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Keliang Liao, Qili He, Panyun Li, Maohua Song, Haifeng Zhao, and Peiping Zhu "Design of a full-filed transmission x-ray microscope with 30nm resolution", Proc. SPIE 13155, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems, 1315518 (30 April 2024); https://doi.org/10.1117/12.3019773

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