For the 4th generation synchrotron radiation (SR) light source, obtaining high-quality light heavily relies on the performance of the injector, which requires a high-resolution system for measuring the low-emittance and small-sized beam profile. Hence, a high-resolution beam profile measurement system for the injector of the 4th generation SR light source Hefei Advanced Light Facility (HALF) under construction is designed. This paper presents the structure of the designed beam profile measurement system, analyzes the simulation results of this system, and discusses the effect of the tilted target on the system resolution. The simulation results show that the system can achieve the resolution of 14.57 μm, the minimum resolved transverse beam size in injector is 50 μm, and the relative measurement error is only 1.12 %. The designed system provides measurements of beam profile and enhances injection efficiency for the HALF injector.
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