Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Cheng Wu; Yu He; Ling Wang

doi:10.1117/12.3013137

30 April 2024 Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Cheng Wu, Yu He, Ling Wang

Author Affiliations +

Proceedings Volume 13155, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems; 1315503 (2024) https://doi.org/10.1117/12.3013137
Event: Sixth Conference on Frontiers in Optical Imaging Technology and Applications (FOI2023), 2023, Nanjing, JS, China

Abstract

Asymmetric spectroscopic prism of a Michelson white-light interference- microscope objective introduces additional dispersion. The tilt of a reference mirror influences the dispersion and measurement accuracy of a white-light interference-based 3D reconstruction system. In this paper, we first numerically analyzed the performances of a Michelson-type interference-microscope objective by measuring a step structure at different tilt angles of the reference mirror. It showed that the height measurement errors were within the range of ±15nm when the tilt angles were 0°, 0.13°, 0.26°, 0.39° and 0.52 ° , respectively. Finally, a self-designed 5 × interference-microscope objective was used in the white-light 3D measurement system to experimentally demonstrate the influence of reference mirror tilting on the measurement. Both experimental and simulated results are in good agreement, showing that the tilt angle of the reference mirror in a 5× Michelson interference-microscope objective should be less than 0.39° while maintaining a measurement error less than ±15nm. We believe our results can provide a theoretical study for the assembly of reference mirror in a Michelson interference-microscope objective.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Cheng Wu, Yu He, and Ling Wang "Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective", Proc. SPIE 13155, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems, 1315503 (30 April 2024); https://doi.org/10.1117/12.3013137

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available