X-ray optics development and metrology at Shanghai synchrotron radiation facility

Lian Xue; Shangyu Si; Haipeng Zhang; Yumei He; Naxi Tian; Changzhe Zhao; Yue Zhang; Qiuqi Mo; Hang Sun; Zhongliang Li; Hongxin Luo

doi:10.1117/12.3023334

15 February 2024 X-ray optics development and metrology at Shanghai synchrotron radiation facility

Lian Xue, Shangyu Si, Haipeng Zhang, Yumei He, Naxi Tian, Changzhe Zhao, Yue Zhang, Qiuqi Mo, Hang Sun, Zhongliang Li, Hongxin Luo

Author Affiliations +

Proceedings Volume 13069, International Conference on Optical and Photonic Engineering (icOPEN 2023); 1306918 (2024) https://doi.org/10.1117/12.3023334
Event: International Conference on Optical and Photonic Engineering (icOPEN 2023), 2023, Singapore, Singapore

Abstract

Modern third-generation synchrotron radiation sources provide more collimated, brighter, and coherent X-ray beams for experimental techniques. X-ray optics are the bridge between the light sources and the experimental stations. Any defect (either from mirrors or crystals) will bottleneck preventing the exploitation of the full characteristics of the source. In addition to high-quality X-ray optics, mirror mounting, and handling of thermal deformation are also of critical importance. Advanced metrology to properly exploit all the new potential of these optics is needed. Shanghai Synchrotron Radiation Facility (SSRF) has metrology labs equipped with visible-light-based measuring instruments and X-ray test beamline for in-situ metrology. In this article, we will present the current state of the art of mirrors, crystals, and diagnostics at SSRF.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lian Xue, Shangyu Si, Haipeng Zhang, Yumei He, Naxi Tian, Changzhe Zhao, Yue Zhang, Qiuqi Mo, Hang Sun, Zhongliang Li, and Hongxin Luo "X-ray optics development and metrology at Shanghai synchrotron radiation facility", Proc. SPIE 13069, International Conference on Optical and Photonic Engineering (icOPEN 2023), 1306918 (15 February 2024); https://doi.org/10.1117/12.3023334

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KEYWORDS

Mirrors

Metrology

X-ray optics

X-rays

Crystals

Synchrotron radiation

Optical testing

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