Design, fabrication, and characterization of high-Q SION waveguide ring resonators

Shun Zhang; Anxin Wang; Shuxiao Wang; Xu Chen; Wei Wang; Yan Cai

doi:10.1117/12.3007790

21 December 2023 Design, fabrication, and characterization of high-Q SION waveguide ring resonators

Shun Zhang, Anxin Wang, Shuxiao Wang, Xu Chen, Wei Wang, Yan Cai

Proceedings Volume 12966, AOPC 2023: AI in Optics and Photonics ; 129661V (2023) https://doi.org/10.1117/12.3007790
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

High-quality factor(Q) waveguide ring resonators (WRRs) are essential components of the resonator-integrated optical gyroscope (RIOG). The single-mode and multimode silicon oxynitride (SION) WRRs are investigated in this paper. The optical, resonance, and polarization properties are characterized. The intrinsic Q of single-mode WRR is 8.25×105 . And the multimode WRR achieves an intrinsic Q of 1.02×10⁶ , corresponding to the waveguide propagation loss of 0.3 dB/cm. The designed multimode SION WRRs can be used as a critical sensing element to enhance RIOG performance further. Keywords: High Q ring resonators, Multi-mode SION waveguide, Integrated optics.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shun Zhang, Anxin Wang, Shuxiao Wang, Xu Chen, Wei Wang, and Yan Cai "Design, fabrication, and characterization of high-Q SION waveguide ring resonators", Proc. SPIE 12966, AOPC 2023: AI in Optics and Photonics , 129661V (21 December 2023); https://doi.org/10.1117/12.3007790

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