Quantitative analysis of cross-section SEM spatial distortion artifacts

Benjamin D. Bunday; Yvette Ball; Shari Klotzkin; Douglas Patriarche

doi:10.1117/12.3012887

10 April 2024 Quantitative analysis of cross-section SEM spatial distortion artifacts

Benjamin D. Bunday, Yvette Ball, Shari Klotzkin, Douglas Patriarche

Proceedings Volume 12955, Metrology, Inspection, and Process Control XXXVIII; 129553O (2024) https://doi.org/10.1117/12.3012887
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

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Benjamin D. Bunday, Yvette Ball, Shari Klotzkin, and Douglas Patriarche "Quantitative analysis of cross-section SEM spatial distortion artifacts", Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, 129553O (10 April 2024); https://doi.org/10.1117/12.3012887

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