Highly nonlinear behavior of UV-curable photopolymer under elastomer-templated low-pressure nanoimprinting

Myung Gi Ji; Rabiul Islam Sikder; Jaeyoun Kim

doi:10.1117/12.3001841

12 March 2024 Highly nonlinear behavior of UV-curable photopolymer under elastomer-templated low-pressure nanoimprinting

Myung Gi Ji, Rabiul Islam Sikder, Jaeyoun Kim

Author Affiliations +

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990N (2024) https://doi.org/10.1117/12.3001841
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

Understanding the dynamic behavior of photopolymers in nanoscale environment is essential to improving MEMS/NEMS device fabrication technologies. Here, we unveil the highly nonlinear behaviors of photopolymers exhibited during the process of light-controlled, low-pressure nanoimprinting. Such peculiarities can complicate the relation between the UV-dose and the height of the nanoimprinted feature, degrading the accuracy of the height control. To address the issue, we establish a theoretical process model and used the control of the nanoimprinting height for structural coloring applications. Our findings will broadly benefit nanotechnology and nanoscience.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Myung Gi Ji, Rabiul Islam Sikder, and Jaeyoun Kim "Highly nonlinear behavior of UV-curable photopolymer under elastomer-templated low-pressure nanoimprinting", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990N (12 March 2024); https://doi.org/10.1117/12.3001841

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available