Advantages and limits of spectrometer free areal chromatic confocal metrology

Johannes Büttner; Korbinian Prause; Michael Layh

doi:10.1117/12.3000433

11 March 2024 Advantages and limits of spectrometer free areal chromatic confocal metrology

Johannes Büttner, Korbinian Prause, Michael Layh

Proceedings Volume 12893, Photonic Instrumentation Engineering XI; 128930X (2024) https://doi.org/10.1117/12.3000433
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

The spectrometer free areal chromatic confocal metrology (ChromaCAM) is an optical 3D surface measurement technology, which allows a simultaneous measurement of a large array of measuring points within a single exposure. In this work, we investigate the accuracy of a first prototype sensor system utilizing this new singleshot 3D measurement technique. It is found that surface height measurement errors smaller 1μm within a total measurement range of about 1000 μm are achievable. Furthermore, several influential factors are investigated showing the advantages and limits of the presented system. Investigating different surface materials it is found that frame rates up to approximately 800 fps for highly reflecting surfaces and up to 30 fps for ceramics, aluminum, and plastics are achievable.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Johannes Büttner, Korbinian Prause, and Michael Layh "Advantages and limits of spectrometer free areal chromatic confocal metrology", Proc. SPIE 12893, Photonic Instrumentation Engineering XI, 128930X (11 March 2024); https://doi.org/10.1117/12.3000433

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