Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society

Doris K. T. Ng; Weiguo Chen; Huanhuan Wang; Zhonghua Gu; Md Hazwani Khairy Md Husni; Isabel Judith Wee Yi Koh; Linfang Xu; Kristel Pei Xuan Wee; Chong Pei Ho; Jia Sheng Goh; Qingxin Zhang

doi:10.1117/12.3021874

11 March 2024 Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society

Doris K. T. Ng, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Md Hazwani Khairy Md Husni, Isabel Judith Wee Yi Koh, Linfang Xu, Kristel Pei Xuan Wee, Chong Pei Ho, Jia Sheng Goh, Qingxin Zhang

Author Affiliations +

Proceedings Volume 12885, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII; 128850Z (2024) https://doi.org/10.1117/12.3021874
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

We develop H₂ gas sensors based on CMOS compatible 20% ScAlN-based pyroelectric detectors fabricated in-house. Leveraging on the high thermal conductivity of H₂, ScAlN-based pyroelectric detector is used in the H₂ sensor for H₂ to conduct away thermal energy received by the detector, resulting in a drop in signal received by the detector, thereby leading to different voltage signals measured for different H₂ gas concentrations. The higher the H₂ gas concentration, the lower the voltage measured as more thermal energy is conducted away from the detector. We successfully demonstrate H₂ gas sensing with the signal received by the pyroelectric detector at concentration ranging from 400 ppm to 1% H₂ concentration. The gases are cycled at 2-minute intervals between different concentrations of H₂, using N₂ as the reference gas. Our measurements show H₂ sensing down to 400 ppm gas concentration with response time ranging from ~3-7 s. In addition, a linear relationship is also observed between the measured output signal from the H₂ gas sensor and the H2 gas concentration flowing across the pyroelectric detector. The results show promise in using CMOS compatible 20% ScAlN-based pyroelectric detectors for development of thermal conductivity H₂ gas sensor in H₂ leakage sensing to increase confidence towards adoption of H₂ as a clean energy as we move towards a sustainable society.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Doris K. T. Ng, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Md Hazwani Khairy Md Husni, Isabel Judith Wee Yi Koh, Linfang Xu, Kristel Pei Xuan Wee, Chong Pei Ho, Jia Sheng Goh, and Qingxin Zhang "Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society", Proc. SPIE 12885, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII, 128850Z (11 March 2024); https://doi.org/10.1117/12.3021874

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