Piezoelectric MEMS fast steering mirror with high reliability for free-space laser communication

Yang Wang; Cheng Zhang; WeiHong Zhu; YongGui Zhang; LiHao Wang; YiChen Liu; Yi Yang; AnNa Li; Zhenyu Wu

doi:10.1117/12.3000029

12 March 2024 Piezoelectric MEMS fast steering mirror with high reliability for free-space laser communication

Yang Wang, Cheng Zhang, WeiHong Zhu, YongGui Zhang, LiHao Wang, YiChen Liu, Yi Yang, AnNa Li, Zhenyu Wu

Proceedings Volume 12877, Free-Space Laser Communications XXXVI; 128770M (2024) https://doi.org/10.1117/12.3000029
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

This paper reports a highly reliable piezoelectric Micro Electro Mechanical System (MEMS) Fast Steering Mirror (FSM) with large optical aperture (10 mm), which utilizes two-level-construction comprising a mirror plate and a actuator hidden beneath the mirror plate, achieving a high resonant frequency (⪆900 Hz) and a large quasi-static scanning range (4 mrad). The leverage structure is adopted not only to amplify the quasi-static deflection angle, but also to achieve a high fill factor (⪆50%). Moreover, compliant flexural structures are optimized to balance the stress to strengthen mechanical robustness. AlScN piezoelectric film is used as actuating material for high piezoelectric coefficient, high linearity and long-term stability. Through experimental verifications, the mirror has been proven to have high mechanical and thermal robustness, namely, withstands mechanical vibration (14.34 g), shock (500g@2ms) and temperature cycling (-40° to 80°) without performance degradation. Meanwhile, the on/off at equal stress experiment further demonstrates the lifetime of the mirror to be more than 12.0E9 cycles.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yang Wang, Cheng Zhang, WeiHong Zhu, YongGui Zhang, LiHao Wang, YiChen Liu, Yi Yang, AnNa Li, and Zhenyu Wu "Piezoelectric MEMS fast steering mirror with high reliability for free-space laser communication", Proc. SPIE 12877, Free-Space Laser Communications XXXVI, 128770M (12 March 2024); https://doi.org/10.1117/12.3000029

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