Thousand hours operations of CW DUV laser light source at 213 nm for high reliability

Tsubaki Nagashima; Naoyuki Seko; Koichi Tatsuki; Hiroshi Tonooka; Junko Murata; Yoshio Wada

doi:10.1117/12.3002230

12 March 2024 Thousand hours operations of CW DUV laser light source at 213 nm for high reliability

Tsubaki Nagashima, Naoyuki Seko, Koichi Tatsuki, Hiroshi Tonooka, Junko Murata, Yoshio Wada

Proceedings Volume 12864, Solid State Lasers XXXIII: Technology and Devices; 128640T (2024) https://doi.org/10.1117/12.3002230
Event: SPIE LASE, 2024, San Francisco, California, United States

Conference Poster

Abstract

We developed a Continuous-Wave (CW) high power 213-nm light source based on a two-stage external cavity SHG scheme based on the scheme developed for 266-nm coherent continuous-wave light generation. We obtained a highest average 213-nm coherent light power of 270 mW and investigated its reliability and long-operation lifetime. Using a homegrown AR-coated β-BaB₂O₄ (BBO) with a large cavity mode size on the crystal, 100 hours continuous operation without spatial shift of the light spot was demonstrated at 50 mW, which shows more than 3000 hours lifetime with a spatial crystal shift.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Tsubaki Nagashima, Naoyuki Seko, Koichi Tatsuki, Hiroshi Tonooka, Junko Murata, and Yoshio Wada "Thousand hours operations of CW DUV laser light source at 213 nm for high reliability", Proc. SPIE 12864, Solid State Lasers XXXIII: Technology and Devices, 128640T (12 March 2024); https://doi.org/10.1117/12.3002230

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