Process chemistry applicable to chrome material

Ken Caple

doi:10.1117/12.3011308

10 October 2023 Process chemistry applicable to chrome material

Ken Caple

Proceedings Volume 12806, Bay Area Chrome Users Society Symposium 1982; 128060B (2023) https://doi.org/10.1117/12.3011308
Event: 2nd Annual BACUS Symposium, 1982, Santa Clara, CA, United States

Abstract

There have been many discussions on different aspects of photolithography and mask making over the years, but very little has been devoted to hard surface chemistry in general.

Citation Download Citation

Ken Caple "Process chemistry applicable to chrome material", Proc. SPIE 12806, Bay Area Chrome Users Society Symposium 1982, 128060B (10 October 2023); https://doi.org/10.1117/12.3011308

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