Research on the preparation of a-Ga2O3 blind photodetector

Mingyang Li; Dayong Jiang; Man Zhao; Yue Zhao; Haixin Zhang; Yanyan Peng; Haoda Li

doi:10.1117/12.2686735

6 August 2023 Research on the preparation of a-Ga₂O₃ blind photodetector

Mingyang Li, Dayong Jiang, Man Zhao, Yue Zhao, Haixin Zhang, Yanyan Peng, Haoda Li

Proceedings Volume 12781, International Conference on Optoelectronic Information and Functional Materials (OIFM 2023); 127813N (2023) https://doi.org/10.1117/12.2686735
Event: 2023 International Conference on Optoelectronic Information and Functional Materials (OIFM 2023), 2023, Guangzhou, JS, China

Abstract

Amorphous gallium oxide (a-Ga₂O₃) is widely used in solar blind ultraviolet detection because of its suitable band gap, simple preparation process and excellent photoelectric properties. This article prepared high-quality a-Ga₂O₃ films on sapphire substrates by magnetron sputtering and evaporated Ti electrodes on the surface of the films to complete the preparation of the photodetector. Explored the optical properties of a-Ga₂O₃ thin films and the photoelectric performance of detectors. The detector exhibits excellent light response characteristics and high photocurrent. This experiment provides an effective reference value for the preparation of a-Ga₂O₃ thin films and the detection of their detectors in the solar blind band.

Citation Download Citation

Mingyang Li, Dayong Jiang, Man Zhao, Yue Zhao, Haixin Zhang, Yanyan Peng, and Haoda Li "Research on the preparation of a-Ga₂O₃ blind photodetector", Proc. SPIE 12781, International Conference on Optoelectronic Information and Functional Materials (OIFM 2023), 127813N (6 August 2023); https://doi.org/10.1117/12.2686735

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