The fabrication of GaAs nanocolumn arrays by nanospheres gas-liquid interface self-assembly method and ICP

Jiayang Xie; Liangchen Hu; Bo Wu; Pan Fu; Yiyang Xie

doi:10.1117/12.2686767

6 August 2023 The fabrication of GaAs nanocolumn arrays by nanospheres gas-liquid interface self-assembly method and ICP

Jiayang Xie, Liangchen Hu, Bo Wu, Pan Fu, Yiyang Xie

Author Affiliations +

Proceedings Volume 12781, International Conference on Optoelectronic Information and Functional Materials (OIFM 2023); 127812Z (2023) https://doi.org/10.1117/12.2686767
Event: 2023 International Conference on Optoelectronic Information and Functional Materials (OIFM 2023), 2023, Guangzhou, JS, China

Abstract

A single layer of tightly arranged silicon oxide nanospheres was formed on GaAs substrate by gas-liquid interface self-assembly method. The silicon oxide nanospheres were used as the etching barrier layer, and the GaAs nanocolumn array was prepared by dry etching with Inductively Coupled Plasma (ICP) of SiCl4/Ar gas. The results show that the morphology of GaAs nanocolumns can be optimized by controlling the technological conditions in the preparation process, such as reaction gas flow, sample chamber pressure and RF power. The optimal technological parameters are obtained, and the GaAs nanocolumn arrays with smooth and steep sidewalls are prepared.

Citation Download Citation

Jiayang Xie, Liangchen Hu, Bo Wu, Pan Fu, and Yiyang Xie "The fabrication of GaAs nanocolumn arrays by nanospheres gas-liquid interface self-assembly method and ICP", Proc. SPIE 12781, International Conference on Optoelectronic Information and Functional Materials (OIFM 2023), 127812Z (6 August 2023); https://doi.org/10.1117/12.2686767

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