Advanced coating equipment; or how to sputter precise interference filters and dielectric mirrors even on larger substrate formats

Michael Schneider

doi:10.1117/12.2692657

30 November 2023 Advanced coating equipment; or how to sputter precise interference filters and dielectric mirrors even on larger substrate formats

Michael Schneider

Author Affiliations +

Proceedings Volume 12778, Optifab 2023; 127780W (2023) https://doi.org/10.1117/12.2692657
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

Among the high challenges of coating technology for optical interference filters and dielectric mirrors are deposition precision and stable reproducibility. These requirements are already very demanding for micro-optical substrate surfaces or optical components below 200 mm aperture area, especially when volume production with high quantities is also involved. Magnetron sputtering technology offers a suitable process that also allows the high precision and stable reproducibility required for alternating layer systems to be transferred to large-area optical substrates. Markets such as AR/VR/XR or automotive are driving demand for interference optical filter and reflective coatings on large-area components. They find application for example for VR glasses, in projecting systems (HUD) or functional interior displays. In the talk, coating solutions required for this purpose for aperture areas up to 300 mm and beyond will be presented and technical challenges for optical manufacturing will be discussed. Some coating results will be presented and the coating of large optics for laser technology will also be briefly covered.

Conference Presentation

Citation Download Citation

Michael Schneider "Advanced coating equipment; or how to sputter precise interference filters and dielectric mirrors even on larger substrate formats", Proc. SPIE 12778, Optifab 2023, 127780W (30 November 2023); https://doi.org/10.1117/12.2692657

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