Status and outlook of EUV optics at ZEISS

Jörg Zimmermann; Jens Timo Neumann; Dirk Jürgens; Paul Gräupner

doi:10.1117/12.2687658

21 November 2023 Status and outlook of EUV optics at ZEISS

Jörg Zimmermann, Jens Timo Neumann, Dirk Jürgens, Paul Gräupner

Author Affiliations +

Proceedings Volume 12750, International Conference on Extreme Ultraviolet Lithography 2023; 127500O (2023) https://doi.org/10.1117/12.2687658
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Abstract

The EUV lithography optics program continues to enable the progress of the semiconductor roadmap with higher productivity and finer imaging resolution. ZEISS Starlith® lithography optics systems with a numerical aperture (NA) of 0.33 and an optical resolution of 13 nm half-pitch are being produced in high volume for integration into ASML´s NXE scanners, which have established themselves as industry workhorses in leading edge semiconductor manufacturing. Even finer imaging resolution will be achieved with the Starlith® 5000 for ASML´s EXE scanners, with NA = 0.55 and an optical resolution of 8 nm half-pitch, with highly flexible illumination and an anamorphic projection optics featuring a central obscuration. The first Starlith® 5000 illuminator and projection optics box have been delivered to ASML. The outlook includes future roadmap extensions for low-k₁ imaging at increased productivity and potential further improvements of the single exposure resolution capabilities.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jörg Zimmermann, Jens Timo Neumann, Dirk Jürgens, and Paul Gräupner "Status and outlook of EUV optics at ZEISS", Proc. SPIE 12750, International Conference on Extreme Ultraviolet Lithography 2023, 127500O (21 November 2023); https://doi.org/10.1117/12.2687658

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE