Low-pressure deposition of diamond thin films

Claus-Peter Klages

doi:10.1117/12.20518

1 August 1990 Low-pressure deposition of diamond thin films

Claus-Peter Klages

Proceedings Volume 1275, Hard Materials in Optics; (1990) https://doi.org/10.1117/12.20518
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

The fundamental possibifity to synthesize diamond under low pressure from the gas phase as a metastable carbon allotrope is known nearly as long as the high pressure route to this valuable material. Nevertheless more than twenty years elapsed, befoie research activities were started world-wide aiming atthe development ofdepositionprocesses meeting the demands of technical applications. In this review the present state ofthis work will be surveyed, with an emphasis on those topics which are of critical importance for an eventual success of a diamond technology: Scale-up of deposition processes, low temperature deposition, heteroepitaxy and control ofnucleation, mechanical adhesion, and electrical properties ofdiamond films.

Citation Download Citation

Claus-Peter Klages "Low-pressure deposition of diamond thin films", Proc. SPIE 1275, Hard Materials in Optics, (1 August 1990); https://doi.org/10.1117/12.20518

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