Laser-induced damage thresholds and optical constants of ion-plated and ion-beam-sputtered Al2O3 and HfO2 coatings for the ultraviolet

Alexandra Starke; Harald Schink; Jurgen Kolbe; Johanes Ebert

doi:10.1117/12.20391

1 August 1990 Laser-induced damage thresholds and optical constants of ion-plated and ion-beam-sputtered Al₂O₃ and HfO₂ coatings for the ultraviolet

Alexandra Starke, Harald Schink, Jurgen Kolbe, Johanes Ebert

Author Affiliations +

Proceedings Volume 1270, Optical Thin Films and Applications; (1990) https://doi.org/10.1117/12.20391
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

For high power laser applications, extinction coefficients and refractive indices of ion beam sputtered resp. ionplated Hf02-, Si02- and A1203- films were determined by spectrophotometric analysis in the wavelength range between 200 and 500 nm. Film qualities were related to the corresponding process parameters. Qualitative information about water content has been obtained by infrared spectroscopy. Impurities and film stoichiometry were determined by RBS analysis. Laser induced damage thresholds were measured with a (KrF*)excimer laser at 248 nm. The tested samples were single layers as well as high reflecting QWOT stacks. All results were compared with the corresponding values of e-beam coatings.

Citation Download Citation

Alexandra Starke, Harald Schink, Jurgen Kolbe, and Johanes Ebert "Laser-induced damage thresholds and optical constants of ion-plated and ion-beam-sputtered Al₂O₃ and HfO₂ coatings for the ultraviolet", Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); https://doi.org/10.1117/12.20391

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