Ellipsometry of thin uniaxial layers

Andrew Y. Tronin; Valery N. Filippov; Alisa F. Konstantinova; Michael M. Karpuk

doi:10.1117/12.20389

1 August 1990 Ellipsometry of thin uniaxial layers

Andrew Y. Tronin, Valery N. Filippov, Alisa F. Konstantinova, Michael M. Karpuk

Proceedings Volume 1270, Optical Thin Films and Applications; (1990) https://doi.org/10.1117/12.20389
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Reviewed are the approaches for the determination of the optical constants - refraction indices, absorption coefficients and thickness of thin uniaxial film with various optical axis orientations, arbitrary among them. The comparative analysis of various measurements - MAI (multi angle of incidence ellipsometry), MTE (multi film thickness ellipsometry), IHE (multi immersion ellipsometry) and MOE (multi orientation ellipsometry) and corresponding techniques for solving the inverse task is given for each type of optical axis orientation.

Citation Download Citation

Andrew Y. Tronin, Valery N. Filippov, Alisa F. Konstantinova, and Michael M. Karpuk "Ellipsometry of thin uniaxial layers", Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); https://doi.org/10.1117/12.20389

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