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3 October 2023 Fabrication and surface evaluation of a high-precision monolithic mirror with complex geometry for soft x-ray focusing
T. Kume, Y. Matsuzawa, T. Saito, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Mimura, H. Hashizume
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Proceedings Volume 12694, Advances in X-Ray/EUV Optics and Components XVIII; 1269408 (2023) https://doi.org/10.1117/12.2677302
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States
Abstract
High-precision monolithic mirrors are used in the soft x-ray beamlines of synchrotron radiation facilities. A figure measurement technique is essential for the fabrication of high-precision mirrors. In recent years, mirrors of various shapes have been proposed, and a versatile figure measurement technique is required. Tactile measurements are one of the most suitable methods for evaluating the figure errors of x-ray mirrors with steep and complex geometries. Because a tactile measurement probe has a wide range of measurable depths and angles and can eliminate measurement errors depending on the sample curvature, tactile measurements have been applied to the fabrication of monolithic mirrors for soft x-ray focusing. In this study, a soft x-ray focusing mirror with concave and convex freeform surfaces on its monolithic substrate was fabricated based on tactile measurements for figure correction. The high- and mid-spatial-frequency roughness were 0.14-0.17 nm and 0.8 nm in RMS, respectively. Furthermore, the figure error evaluated using the tactile measurement was 2.64 nm in RMS.
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(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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T. Kume, Y. Matsuzawa, T. Saito, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Mimura, and H. Hashizume "Fabrication and surface evaluation of a high-precision monolithic mirror with complex geometry for soft x-ray focusing", Proc. SPIE 12694, Advances in X-Ray/EUV Optics and Components XVIII, 1269408 (3 October 2023); https://doi.org/10.1117/12.2677302
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KEYWORDS
Mirrors
X-rays
Fabrication
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