In-situ fiber interferometer for measuring quasi-conical diamond-turned surfaces

Lech Wosinski; Magnus Breidne

doi:10.1117/12.20268

1 August 1990 In-situ fiber interferometer for measuring quasi-conical diamond-turned surfaces

Lech Wosinski, Magnus Breidne

Proceedings Volume 1266, In-Process Optical Measurements and Industrial Methods; (1990) https://doi.org/10.1117/12.20268
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

This paper describes a fiber-optic interferometer which uses two laser diodes in a modified Mach-Zender configuration for testing aspherical surfaces with phase shift technique and a possibility to implement two wavelength technique. Experimental results show that this type of interferometer is very useful for in-process control directly on a diamond turning machine, the test element still attached to the chuck.

Citation Download Citation

Lech Wosinski and Magnus Breidne "In-situ fiber interferometer for measuring quasi-conical diamond-turned surfaces", Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); https://doi.org/10.1117/12.20268

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