Direct writing on structured substrate by pyrolytic laser deposition

Janos Farkas; Andras Hamori; Zsolt Szabo

doi:10.1117/12.20212

1 June 1990 Direct writing on structured substrate by pyrolytic laser deposition

Janos Farkas, Andras Hamori, Zsolt Szabo

Proceedings Volume 1264, Optical/Laser Microlithography III; (1990) https://doi.org/10.1117/12.20212
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

The effects of surface material and quality on the deposition process are crucial factors in pyrolytic laser direct writing applications on stuctured substrate. Any change in the deposition parameters of different layers leads to unevenly deposited lines or may cause line breaking at the boundaries of the layers. Apart from the well known effects caused by changes in the thermal properties of the substrate its physico-chemical properties may also influence the deposition parameters. Some experimental data are presented which are not directly explai. . nable as a result of changes in the thermal properties of the substrate. In order to rectifr partially the surface effects we suggest utilizing an electric control system based on in-situ transmission and reflection measurement which may enhance the deposited line quality and provide a means of detecting the line breaking. 1.

Citation Download Citation

Janos Farkas, Andras Hamori, and Zsolt Szabo "Direct writing on structured substrate by pyrolytic laser deposition", Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); https://doi.org/10.1117/12.20212

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