Novel cresol/chloroacetaldehyde novolacs for high-temperature resist applications

Thomas R. Sarubbi; Andrew J. Blakeney; Joseph J. Sizensky; Nancy N. Greene; Shinji Sakaguchi; Shiro Tan; Gregory Luckman

doi:10.1117/12.20121

1 June 1990 Novel cresol/chloroacetaldehyde novolacs for high-temperature resist applications

Thomas R. Sarubbi, Andrew J. Blakeney, Joseph J. Sizensky, Nancy N. Greene, Shinji Sakaguchi, Shiro Tan, Gregory Luckman

Author Affiliations +

Proceedings Volume 1262, Advances in Resist Technology and Processing VII; (1990) https://doi.org/10.1117/12.20121
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

A new class of novolacs has been developed which imparts a unique blend of sensitivity, submicron resolution and image thennai flow resistance to positive photoresist formulations. The novolac system is based upon condensation of metaand para-cresol with a chloroaceta!dehyde equivalent. The resists are based upon formulations of the new chloroacetaidehyde (CM) novolacs and typical diazonaphthoquinone photoactive compounds. The resist image thermal flow temperatures can exceed 200°C depending upon the molecular weight and composition of the novolac. As a result of the high thermal flow properties of the CM novolac, the resists are verb' stable to reticulation in aluminum or oxide plasma etching environments, eliminating the need for Deep UV curing.

Citation Download Citation

Thomas R. Sarubbi, Andrew J. Blakeney, Joseph J. Sizensky, Nancy N. Greene, Shinji Sakaguchi, Shiro Tan, and Gregory Luckman "Novel cresol/chloroacetaldehyde novolacs for high-temperature resist applications", Proc. SPIE 1262, Advances in Resist Technology and Processing VII, (1 June 1990); https://doi.org/10.1117/12.20121

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available