Modeling the topographic lateral resolution of interferometers

P. J. de Groot; J. W. Kramer; T. P. Sutherland

doi:10.1117/12.2670939

10 August 2023 Modeling the topographic lateral resolution of interferometers

P. J. de Groot, J. W. Kramer, T. P. Sutherland

Proceedings Volume 12619, Modeling Aspects in Optical Metrology IX; 126190N (2023) https://doi.org/10.1117/12.2670939
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

Performance characteristics for interferometers that measure surface topography include the ability to resolve closely spaced surface features, referred to as topographic spatial resolution. Within well-defined limits, scalar diffraction theory and classical Fourier optics provide a software model for prediction of the resolution and spatial frequency response for interference phase-based measurements of surface topography. Analytical solutions and adaptive sampling allow for rapid simulation of both the nominal linear transfer function and an estimate of intrinsic residual nonlinearities.

Conference Presentation

Citation Download Citation

P. J. de Groot, J. W. Kramer, and T. P. Sutherland "Modeling the topographic lateral resolution of interferometers", Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 126190N (10 August 2023); https://doi.org/10.1117/12.2670939

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available